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Piezo Motor
1 axis Stage
| 1 axis Stage | Cross roller guide 1 axis Stage | Linear guide 1 axis Stage | |||||
| 형 식 | XDT50-04 | XDT70-10 | XDT70-15 | XMDT50-05 | XCWT70-10 | XCWT70-15 | XLGT70-15 |
| Stroke | 4mm | 10mm | 15mm | 5mm | 10mm | 15mm | 15mm |
| Resolution | open 구동 또는 1Pulse : 1.0, 0.5, 1.0, 5.0㎛ | ||||||
| Repeatability | ±3 pulse (encoder type의 경우에만) | ||||||
| Thrust power | 70gf | 70gf | 60gf | 60gf | 80gf | 70gf | 70gf |
| Holding Force | 300gf | 350gf | 300gf | 300gf | |||
| Speed | |||||||
| Weight | 11g | 13g | 14g | 5g | 30g | 40g | 23 |
2 axis Stage
| 2 axis Stage | Cross roller guide 2 axis Stage | Finger unit | ||||||
| 형 식 | XYDT50-04 | XYDT70-10 | XYDT70-15 | XYCWT70-10 | XYCWT70-15 | FDUT50-03 | FSDUT50-06 | FLGUT70-03 |
| Stroke | 4mm | 10mm | 15mm | 10mm | 15mm | 3mm | 3mm | 1.5mm |
| Resolution | open 구동 또는 1pulse : 0.1, 0.5, 1.0, 5.0 ㎛ | |||||||
| Repeatability | ±3 pulse (encoder type의 경우에만) | |||||||
| Thrust power | 60gf | 60gf | 50gf | 80gf | 70gf | 50gf | 20gf | |
| Holding Force | 250gf | 350gf | 150gf | 70gf | ||||
| Speed | 10mm/s | - | ||||||
| Weight | 22g | 26g | 28g | 60g | 80g | 16g | 25g | 24.6g |
| Finger arm길이 | 18.6mm | 28.9mm | 16.8mm | |||||
| 가반중량 | 15g | 10g | ||||||
Rotary Stage
| 회전 Stage | 중공 회전 Stage | ※ 선택가능 동작온도/습도 +10 ~ +50℃ 0~80%(결로 없을 것) 보존온도/습도 -10 ~ +60℃ 0~80%(결로 없을 것) | |||||
| 형 식 | θDT50 | θDT70 | θMDT50 | θHDT70-H10 | θHDT70-H20 | θHDT70-H30 | |
| 회전각 | 0˚/60˚/90˚/140˚/180˚/260˚/300˚/360˚ ※ | 60˚/120˚/180˚/240˚/360˚ ※ | 360˚ | ||||
| 중공경 | Φ10.5mm | Φ22mm | Φ31mm | ||||
| Resolution | open 구동 또는 1pulse : 0.005˚ | ||||||
| Repeatability | ±3 pulse (encoder type의 경우에만) | ||||||
| Torque | 40g·cm | 50g·cm | 40g·cm | 50g·cm | |||
| Holding Force | 130g·cm | 150g·cm | 150g·cm | 150g·cm | |||
| Weight | 10g | 19g | 8g | 15g | 58g | 70g | |